Nanomaterials: Application & Properties, Nanomaterials: Application & Properties '2013

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Effect of Preparation Conditions in the Pressure Range of Atmospheric Nitrogen (2 ... 50) ∙10-4 Torr on the Structural and Phase State of the Vacuum-arc Coatings of Mo-N
Oleg Valentinivich Sobol`, A. A. Andreev, V. A. Stolbovoy, V. E. Fil’chikov, S. N. Grigoriev, M. V. Volosova

Last modified: 2013-08-31


This work deals with the impact of the reactive atmosphere (N2) pressure and bias potential values on the phase-structural state of the coatings being formed. It has been found that at a low bias potential Ub=(0 … -40) V, and with pressure increase from 2·10-4 up to 5·10-3 Torr, phase formation takes place in the following sequence: supersaturated solid solution of nitrogen in the bcc lattice of Mo (Mo(N)) → γ-Мо2N → γ-MoN phases with the NaCl-type lattice and with different degrees of octahedral interstitial site occupation with nitrogen. At Ub=(-40 … -100) V, the sequence of phase-structural states is as follows: Мо (Мо(N)) → γ-Мо2N → ε-MoN (hexagonal lattice) → δ-МоN. At highest Ub (with a strong radiation factor effect) values ranging between -150 V and -200 V and with pressure increase, the composition changes to Мо (Мо(N)) → γ-Мо2N → β-Мо2N → ε-MoN → δ-МоN.

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