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Kuzmenko, A. P., <p class="NAPAffiliations">Kursk State Technical University, Center for collective use "High Tech", 94, October 50 Str., 305040, Kursk</p>, Russian Federation
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Nanomaterials: Application & Properties '2014 - Nanostructured Thin Films
Structure and Properties NbN and Nb-Si-N Deposited by Magnetron Sputtering
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