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Nazarov, Alexei N., Lashkaryov Institute of Semiconductor Physics NAS of Ukraine, Ukraine
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Nanomaterials: Application & Properties '2016 - Plasma and Ions for Surface Engineering. Radiations Effects
Hydrogen Plasma Modification of Shallow Implanted Germanium Layers
Abstract -
9th International Conference on Nanomaterials: Applications & Properties '2019 - Surface Science & Imaging
RF Plasma Monolayer Doping of Si Nanowires
Abstract
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