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Kozak, Andrii, Institute for Problems of Materials Sciences, NAS of Ukraine, 3, Krzhyzhanovsky str., 03142 Kyiv, Ukraine, Ukraine
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Nanomaterials: Application & Properties '2014 - Nanostructured Thin Films
Effect of Substrate Temperature on the Properties of PECVD SiCN Films
Abstract PDF -
7th International Conference Nanomaterials: Application & Properties '2017 - Properties and Characterizations of Surfaces and Interfaces
Effect of substrate temperature on the optoelectronic properties of Si-C-N:H films
Abstract
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