User
Chyhir, R. R., Open Joint Stock Society "INTEGRAL"-", INTEGRAL" Holding Managing Company, Minsk, Belarus, Belarus
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7th International Conference Nanomaterials: Application & Properties '2017 - Measurement and Analysis of Nanoscale
Depth measurement of nanoscale damage to the surface of silicon wafers in the production of submicron integrated microcircuits by Auger spectroscopy method
Abstract
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