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Tomila, Tamara, Institute for Problems of Materials Sciences, NAS of Ukraine, 3, Krzhyzhanovsky str., 03142 Kyiv, Ukraine
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9th International Conference on Nanomaterials: Applications & Properties '2019 - Thin Films & Coatings
Multilayer PECVD Si-C-N films
Abstract -
2021 IEEE 11th International Conference on "Nanomaterials: Applications & Properties" (NAP-2021) - 2. Multifunctional Thin Films & Coatings
Influence of annealing on the structure and mechanical properties of PECVD Si-C-N films
Abstract
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