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Stolbovoy, V. A., National Science Center "Kharkiv Institute of Physics and Technology", 1, Akademicheskaya St., Kharkiv 61108, Ukraine
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Nanomaterials: Application & Properties '2015 - Functional Nanostructured Coatings
About Peculiarities of the Influence of the Negative Bias Potential Applied to the Substrate During the Deposition Process on the Structural State and Properties of the Multilayer system MoN-CrN
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