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Rogoz, Vladyslav, <em>Sumy State University, Department of Nanoelectronics, 40007 Sumy, Ukraine</em>, Ukraine
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2018 IEEE 8th International Conference on Nanomaterials: Applications & Properties - 1. Synthesis and Properties of Nanomaterials
Microstructure and Mechanical Properties of Multilayered α-AlN/α-BCN Coatings Depending on Flux Density During Target B4C Sputtering
Abstract
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